Sunday ALD/ALE Tutorial Session Presentation: F. Roozeboom, R. Puurunen, H. Pedersen, P. Banerjee, A. Dameron, 253 min 29 sec
Monday Plenary & Awards Live Session Presentation: T. Younkin, Y. Kim, K. Arts, R. Mullins, K. Van Dongen, M. Collings, S. George, S. Barry, M. Kräuter, X. Sang, J. Murdzek, S. Wang, 243 min 4 sec
Tuesday Precursors (AF): ALD Processes Live Session Presentation: M. Sung, N. Uene, K. Tan, T. McKee, C. Marichy, M. Knaut, P. Kaur, S. Elliott, M. Nolan , A. Chernikova, E. Borujeny, J. Lenef, R. Islam, A. Khan, T. Sandoval, 268 min 54 sec
Tuesday ALD Applications (AA) Live Session Presentation: C. Yoo, H. Kim, M. Mattinen, N. Schneider, M. Knez, N. Adjeroud, E. Kazyak, F. Hashemi, J. Bachmann, G. Vanko, N. Pinna, J. Shi, A. Yanguas-Gil, 260 min 51 sec
Tuesday Atomic Layer Etching Live Session I Presentation: T. Nishizuka, G. Antoun, X. Wang, J. Tercero, A. Lii-Rosales, A. Basher, M. McBriarty, A. Cano, G. Oehrlein, 152 min 44 sec
Wednesday Selective Deposition (AS) Live Session Presentation: H. Lee, S. Tymek, M. Merkx, J. Clerix, L. Souqui, R. Ramesh, H. Oh, S. Schmucker, T. Sandoval, R. Azoulay, P. Poodt, L. Leppilahti, C. Winter, H. Soensteby, S. Clendenning, 269 min 39 sec
Wednesday AM/AF (in-situ metro) Live Session Presentation: F. Daresibi, E. Kokkonen, A. Howzen, M. Karppinen, K. Ashurbekova, A. Philip, S. Ghafourisaleh, D. Bergsman, M. Junige, N. Poonkottil, X. Meng, M. Losego, C. Ban, 258 min 21 sec
Wednesday Atomic Layer Etching Live Session II Presentation: G. Yeom, E. Cheng, C. Harvey, X. Yang, E. Kessels, L. Hamraoui, T. Sawada, E. Tinacba, S. Tan, J. de Marneffe, M. Jaffal, N. Chittock, J. Reif, 239 min 37 sec
Understanding Metal-Support Interactions in Model Pd/ALD-Al2O3/SiO2 Catalysts Presentation: Mr. Arun Asundi, 15 min 50 sec
Atomic Layer Deposition for Improved Biomass Conversion Catalysts Presentation: Dr. Wilson McNeary, 14 min 44 sec
Size Control of Gold Nanoparticles Using Sequential Atomic Layer Deposition of Gold and Titanium Dioxide Presentation: Dr. Saeed Saedy, 14 min 32 sec
Atomic Layer Deposition of Pt@Pd Core-Shell Structure Electrocatalyst for Carbon Dioxide Reduction Presentation: Mr. Ming Li, 11 min 24 sec
Electrochemical Activation of Atomic Layer Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation Presentation: Mr. Gerben van Straaten, 15 min 0 sec
High-crystalline RuO2based on Atomic Layer Deposition for Oxygen Evolution Catalyst Presentation: Dr. Jaehyeok Kim, 12 min 25 sec
Li Compound-Based Two-Terminal Artificial Synaptic Devices via Atomic Layer Deposition Presentation: Ms. Hye Rim Kim, 16 min 1 sec
Li-Nb-O Family Deposited by Atomic Layer Deposition (ALD) for Artificial Neuron and Synapse Presentation: Mr. Hyun Seung Choi, 14 min 20 sec
Fabrication of Vertical-Type Phase-Change Memory Leveraging Atomic Layer Deposition Presentation: Mr. Jeong Woo Jeon, 14 min 14 sec
Metal-insulator Transition in ALD VO2 using VCl4 and H2O as Precursors Presentation: Mr. Jeya Prakash Ganesan, 12 min 24 sec
Atomic Layer Deposition of Antiferroelectric La-Doped Hf0.5Zr0.5O2 Thin Film and Its Electrical Behaviors Presentation: Dr. Yong Chan Jung, 13 min 15 sec
Study of the Impact of Annealing and Doping Element on the Crystallinity of Hafnium Oxide: Application for FeFET Memories Presentation: Mr. Ivane BOTTALA-GAMBETTA, 16 min 25 sec
Effect of Ti Scavenging Layer on Ferroelectricity of HfxZr1−xO2 Thin Films Fabricated by Atomic Layer Deposition using Hf/Zr Cocktail Precursor Presentation: Mr. Takashi Onaya, 12 min 48 sec
Structural Modulation of ALD IGZO TFT for Controlling the Hydrogen Concentration Presentation: Mr. Wan-Ho Choi, 13 min 52 sec
The Impact of PEALD InGaO TFT Performances on Paring In/Ga Precursor Structures Presentation: Mr. TaeHyun Hong, 12 min 3 sec
Two-dimensional electron gas at atomic-layer-deposited ZnS/ZnO Heterostructure Presentation: Mr. Jae Hyun Yoon, 13 min 17 sec
Three-Dimensional Multi-Stacked Field-Effect Transistor Using Two-Dimensional Electron Gas at the Interface ofAl2O3/ZnO Ultra-Thin Film Heterostructures Presentation: Ms. Ji Hyeon Choi, 14 min 20 sec