FCMN 2000
15 Presentations
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Invited Oral Presentation: X-ray Metrology by Diffraction and Reflectometry
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Invited Oral Presentation: Technology in the Internet Era
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Invited Oral Presentation: Impact of the ITRS Metrology Roadmap
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Invited Oral Presentation: Guidelines For Selecting Multi-Technology Recipes In Multilayer Filmstack Measurements
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Invited Oral Presentation: Optoacoustic Metrology for Copper Interconnects Using Impulsive Stimulated Thermal Scattering (ISTS)
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Invited Oral Presentation: Ultra High Resolution X-ray Detectors
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Invited Oral Presntation: John Bardeen and Transistor Physics
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Invited Oral Presentation: Silicon Wafers for the Mesoscopic Era
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Invited Oral Presentation: Semiconductor Material Applications of Rapid X-ray Reflectometry
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Invited Oral Presentation: The Transition to Cu, Damascene and Low-K Dielectrics for Integrated Circuit Interconnects, Impacts on the Industry
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Invited Oral Presentation: Challenges of Gate Dielectric Scaling, Including the Vertical Replacement-Gate MOSFET
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Invited Oral Presentation: Gate Dielectric Metrology Using Advanced TEM Techniques
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Invited Oral Presentation: The Status and Future of Imaging Metrology Needs for Lithography
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Invited Oral Presentation: Spectroscopic Ellipsometry: From the Vacuum Ultraviolet to the Far Infrared
