FCMN 2009
30 Presentations
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Invited Oral Presentation: Overview Of 3D Integration Requirements
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Invited Oral Presentation: Synchrotron-Based Nanocharacterization
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Invited Oral Presentation: Characterization of Integrated Nano Materials
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Invited Oral Presentation: Research Challenges for CMOS Scaling: Industry Directions
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Invited Oral Presentation: Metrology for Emerging Materials, Devices, and Structures: Graphene as an Example
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Invited Oral Presentation: A 3D Stacked Nanowire Technology - Applications in Advanced CMOS and Beyond
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Invited Oral Presentation: Boron Nanowires for Flexible Electronics and Field Emission
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Invited Oral Presentation: Application of TOF-SIMS and LEIS for the Characterization of Ultra-Thin Films
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Invited Oral Presentation: Mask Metrology - Current and Future Challenges
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Invited Oral Presentation: Innovation: the 4th Factor of Production
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Invited Oral Presentation: Dark-Field Holography for the Measurement of Strain at the Nanoscale
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Invited Oral Presentation: Aberration-Corrected Electron Microscopy for Nanoelectronics Applications
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Invited Oral Presentation: Nanoscale Measurement Methods for Novel Material Characterization
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Invited Oral Presentation: Challenges and Opportunities for Modeling and Simulation
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Invited Oral Presentation: Scanning Single Electron Transistor Microscopy on Graphene
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Invited Oral Presentation: Nanotechnology: Impact on Metrology
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Invited Oral Presentation: Simulations of Scatterometry Down to 22 nm Structure Sizes and Beyond
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Invited Oral Presentation: Understanding Imaging and Metrology with the Helium Ion Microscope
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Invited Oral Presentation: Nanoelectronics Landscape In Europe: New Opportunities for Research and Innovation
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Invited Oral Presentation: Improved Resolution and New Analysis Capabilities
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Invited Oral Presentation: Enabling Technologies for <20nm Generations
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Invited Oral Presentation: Progress towards Low Vacuum Critical Dimension Metrology
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Invited Oral Presentation: FINFET Doping: Fabrication and Metrology Challenges
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Invited Oral Presentation: Scaling Effects on Ferro-Electrics: Application in Nanoelectronics and Characterization