FCMN 2013 | AVS Technical Library

FCMN 2013

84 Presentations

Poster Presentation: Graphene as Transparent Electrode for Direct Observation of Hole Photoemission from Silicon to Oxide

Presentation: Rusen Yan (1,2), Qin Zhang (1,2), Oleg A. Kirillov (1), Wei Li (1,3), James Basham (1), Alex Boosalis (1,4), Xuelei Liang (3), Debdeep Jena (2), Curt A. Richter (1), Alan Seabaugh (2), David J. Gundlach (1), Huili G. Xing (2), and N. V. Nguyen (1), 1 slide
Poster Presentation: Interactions Between Two Independently Contacted and Rotationally Aligned Graphene Layers

Presentation: Christopher Corbet, Kayoung Lee, Babak Fallahazad, Emanuel Tutuc, and Sanjay Banerjee, 1 slide
Poster Presentation: FinFET Sidewall Roughness Measurement and Correlation to Device Performance

Presentation: A. F. Bello (1), Aaron Cordes (2), Abhijeet Paul (1), Shogo Mochizuki (3), Chun-Chen Yeh (4), and Huiming Bu (4), 1 slide
Poster Presentation: Optical Scatterometry for In-Die Sub-Nanometer Overlay Metrology

Presentation: Henk-Jan H. Smilde (1), Martin Jak (1), Arie den Boef (1), Mark van Schijndel (1), Murat Bozkurt (1), Andreas Fuchs (1), Maurits van der Schaar (1), , Steffen Meyer (1), Stephen Morgan (1), Jon Wu (1), Vincent Tsai (1), Frida Liang (1), Cathy Wang (1), Kaustuve Bhattacharyya (1), Guo-Tsai Huang (2), Chih-Ming Ke (2), and Kai-Hsiung Chen (2), 1 slide
Poster Presentation: On Sub-10 nm 3D CD-SEM Metrology

Presentation: András E. Vladár, John S. Villarrubia, Bin Ming, and Michael T. Postek, 1 slide
Poster Presentation: CD Metrology Gaps Analysis from the 22 nm Node Onwards

Presentation: Benjamin Bunday, 1 slide
Poster Presentation: Fabrication and Characterization of Standards for Atomic Force Microscope Tip Width Calibration

Presentation: Ronald Dixson (1), Craig McGray (1), Boon Ping Ng (2), Ndubuisi G. Orji (1), and Jon Geist (1), 1 slide
Poster Presentation: Shallow Probe: Non-Destructive Compositional Metrology for Films and Structures

Presentation: Mona P. Moret, Anna Meura, Anne-Sophie Robbes, and Michel Schuhmacher, 1 slide
Poster Presentation: Device-Level Electrical Characterization Using Ferromagnetic Resonance of Magnetic Multilayers

Presentation: Eric R. Evarts, Matthew R. Pufall, and William H. Rippard, 1 slide