FCMN 2017
67 Presentations
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Keynote Talk: Beyond CMOS Technologies
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Invited Oral Presentation: Metrology Requirements and Challenges for Advanced FinFET Technology Based on TCAD Simulation
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Invited Oral Presentation: Quantitative Atom Probe Tomography of Complex Systems
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Invited Oral Presentation: Opportunities and Challenges for Hybrid Characterization and Metrology for Emerging Technologies
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Invited Oral Presentation: Automated Work Flow for Process Control and Defect Analysis
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Invited Oral Presentation: Examination of Advanced Technologies in Characterization, Diagnostics, and Verification at Different Stages in the Manufacturing Lifecycle of Packaged IC Devices
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Invited Oral Presentation: Overview of Magnetics/Spintronics
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Invited Oral Presentation: Nano-Magnetic Metrologies
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Invited Oral Presentation: Challenges in Nanotopography Measurements at Die Level
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Invited Oral Presentation: OCD Metrology for Advanced Lithography
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Invited Oral Presentation: Muller Matrix-based Scatterometry
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Invited Oral Presentation: Interfacial Electronic Characterization of Oxides/Metals on High Mobility Semiconductors Using in-situ Synchrotron Radiation Photoemission and the Correlation with the Interfacial Electric Properties
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Invited Oral Presentation: Electron Optics in Graphene Heterostructures with Nanopatterning
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Invited Oral Presentation: XPS, STM, LEIS, …. of 2D Materials - Graphene, H-BN, and TMD Materials
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Invited Oral Presentation: State of the Art e-Beam Inspection Technology
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Invited Oral Presentation: Current and Future Critical Dimension Metrology Technology Perspectives for Sub-10nm Processes
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Invited Oral Presentation: Metrology and Characterization Challenges for Complex 2.5 D and 3 D Packaging
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Invited Oral Presentation: Novel Metrology Solution for Advanced Packaging Based on Multi-energy X-ray Microscopy and Tomography
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Invited Oral Presentation: Future Needs of Characterization and Metrology for Silicon Qubits in Quantum Computing
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Invited Oral Presentation: Size Dependent Resistivity in Narrow Fins as Probed with Micro-FPP
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Invited Oral Presentation: Reflective Small Angle Electron Scattering to Characterize Nanostructures
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Invited oral Presentation: Individual Device Analysis Using Hybrid TEM-Scalpel SSRM Metrology
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Poster Presentation: Direct Observation of Alloyed Contact Formation in Nanowire Cross-Section
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Poster Presentation: Contribution of Luminescence Techniques for the Characterization of Materials and Devices at the Nanoscale
