FCMN 2024
44 Presentations
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Plenary: Big Data, Little Data, and Virtual Twins: Accelerating Process Development for Semiconductor Device Fabrication
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Invited Oral Presentation: Ultrafast Spectroscopy of/for Nanoelectronics
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Invited Oral Presentation: In-Line Metrology for Sub-2nm Technology Nodes
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Invited Oral Presentation: Applications of Machine Learning to STEM and 4DSTEM Characterization
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Invited Oral Presentation: Coulomb-correlated Electrons in a Transmission Electron Microscope
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Invited Oral Presentation: Scanning Probe Microscopy: Pushing the Boundaries with Multi-Probes and Reverse Tip Sample Scanning
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Invited Oral Presentation: X-ray Metrology for Characterizing Advanced Nanoelectronics Structure
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Invited Oral Presentation: Fault Isolation Approaches for 3D IC Systems
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Invited Oral Presentation: Next Generation Metrologies & Fault Detection Methods in Support of Advanced Packaging
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Invited Oral Presentation: Arrangement of Nanosized hBN Quantum Sensor Spots by Helium Ion Microscope
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Invited Oral Presentation: 3D Metrology and Inspection of Advanced NAND and DRAM Devices Via Full 3D Characterization with FIB-SEM Tomography
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Invited Oral Presentation: Measuring the Complex Behavior of Phase in the EUV Regime and Implications for Phase Shift Masks
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Invited Oral Presentation: Advanced and Future Logic Device Architectures: Challenges and Solutions in Materials Metrology
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Invited Oral Presentation: New Directions for Optical Critical Dimension Metrology
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Invited Oral Presentation: Soft X-Ray Scatterometry for 3D CD Metrology on Individual GAA Nanosheets
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Invited Oral Presentation: Overview Of Critical Dimension Small Angle X-ray Scattering (CD-SAXS)
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Invited Oral Presentation: Understanding the Damage and Microstructural Evolution in Cu Metallizations During Thermomechanical-Fatigue
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Invited Oral Presentation: Advances in 3D Tomography and 4DSTEM: Perspectives to Study Semiconductor Devices
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Invited Oral Presentation: Integrating Atom Probe Tomography and Transmission Electron Microscopy into a Single Instrument
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Invited Oral Presentation: Characterization of Magnetic Textures in Materials for Spintronics-based Devices
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Poster Presentation: Characterization of Crystal Structure and Morphology of Ultra-Thin 2D MoS2 Layers Using X-ray Metrology
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Poster Presentation: Asymmetry of Junction Line Defect Distribution in WS2-WSe2 Lateral / Vertical Hetero-structures Revealed by TERS Imaging
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Poster Presentation: Atom Probe Tomography Using an Extreme Ultraviolet Pulsed Light Source
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Poster Presentation: Merging Integrated Photonics and Electron Beams: μeV-Electron-Spectroscopy and Single-Particle Heralding
