ALD-ALE 2019 Presentations
364 Presentations
0 Sections
Homogeneously Doped Atomic Layer Deposition Zinc Tin Oxide Thin Films for Improving Contact Resistance in Semiconductor Device Applications
High-Temperature Thermal Stability of ALD-TiN Metal Gate on In-situ Al2O3/Y2O3/(In)GaAs(001): Toward the Self-Aligned Gate-First Process
Identification of Interfacial Defect in ALD Grown Al2O3/GeOx/Ge Gate Stack
Effect of Metal-insulator Interface on Dielectric Properties of Ultrathin Al2O3 and MgO Fabricated using In-situ Sputtering and Atomic Layer Deposition
Thermal and Plasma ALD Al2O3 Gate Insulator for GaN Electronic Devices Characterized by CV-Stress Measurements
Influence of Surface Cleaning Process on Initial Growth of ALD-Al2O3 and Electrical Properties of f Pt/Al2O3 /β-Ga2O3 MOS Capacitors
Atomic Layer Deposition of IGZO Thin Films for BEOL Applications
High Voltage MIM Capacitor based on ALD Deposited Crystalline HfAlOx Film
Improved Performance of GaN Metal-Oxide-Semiconductor Capacitors by Plasma ALD of AlN Interlayer
High Performance Atomic Layer Deposition (ALD) of Gate Dielectrics for 4H-SiC Power Device Application
Effect of Al2O3 Passivation on n-type Si Solar Cell with Passivated Emitter and Rear Cell (PERC)
High Quality CaF2 from a New ALD Process: Enabling New Approaches in Battery Technology and Optical Applications
Properties of Molybdenum Oxide Deposited by Plasma Enhanced Atomic Layer Deposition for High Efficiency Solar Cells
Understanding and Mitigating F Migration in ALD Nanocomposite Coatings
Ultrathin Metal Oxide Passivation by Atomic Layer Deposition Enhances Stability and Performance of Visible Solar Water Splitting on Solution-Processed Organic Semiconductor Thin Films
Enhancement of Photovoltaic Efficiency using a Novel Nickel-4 Mercaptophenol Hybrid Interfacial Layer
Enhancement of Photovoltaic Properties of Metal/III-V Schottky Solar Cells using Al2O3 Anti-Reflection and Passivation Layer
Investigation of ALD-grown i-ZnO Buffer Layer Properties for CIGS Solar Cell Application
Atomic Layer Deposited Zirconium-doped ZnO Transparent Conductive Oxides for Silicon Solar Cells
Atomic Layer Deposition of Few-Atom Cluster Arrays for Solar Fuel Catalysis
Highly Dispersed Uniform Pt Catalysts on Carbon Support by Atomic Layer Deposition with Fluidized Bed Reactor(FBR).
Synthesis of Core Shell Nanocatalysts using Atomic Layer Deposition with Fluidized Bed Reactor for PEMFC
ALD for Membrane Applications
