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ALD/ALE 2019 Presentations
All Days
Sunday, Jul 21st, 2019
Monday, Jul 22nd, 2019
Tuesday, Jul 23rd, 2019
Wednesday, Jul 24th, 2019
All Tracks
2D Nanomaterials by ALD (including Transition Metal Dichalcogenides)
ALD for Batteries I
ALD for Batteries II
ALD for Biological and Space Applications
ALD for Catalysts, Electrocatalysts, and Photocatalysts
ALD for Manufacturing Poster Session
ALD for Memory Applications I
ALD for Memory Applications II
ALD for Solar Cells, Fuel Cells, and H<sub>2</sub> Storage
ALD for ULSI Applications I
ALD for ULSI Applications II
ALD Growth Mechanisms I
ALD Plenary Session
ALD Precursors I
ALD Precursors II
ALE: Gas-phase and/or Thermal ALE
ALE of Compound Semiconductors
ALE Plenary Session
Alternative Methods to ALE
Area-Selective ALD by Area-Deactivation
Area-Selective ALD: Combinations with Etching
Area Selective ALD Poster Session
Area-Selective ALD Techniques
Atomic Layer Etching Poster Session
Catalysis and Sensor Applications Poster Session
Characterization of ALD Films Poster Session
Emerging Applications I
Emerging Applications II
Emerging Applications Poster Session
Emerging Materials Poster Session
Energy-enhanced ALE
Energy Harvesting and Storage Poster Session
Epitaxial Growth and III-V Materials
Growth and Characterization I
Growth and Characterization II
Growth Mechanisms and In Situ Studies Poster Session
Growth Mechanisms II
In-Situ Characterization of ALD Processes
Integration & Application of ALE
Late Breaking Abstracts
Materials Selective ALE
Microelectronics Poster Session
Modeling & Instrumentation I
Modeling & Instrumentation II
Molecular Layer Deposition
Nanostructures Synthesis and Fabrication Poster Session
Organic-Inorganic Hybrid Materials
Plasma ALD: Growth and Characterization
Plasma Enhanced ALD Poster Session
Precursor Selection and Growth Optimization Poster Session
Precursor Synthesis and Process Development Poster Session
Protective Coatings, Barrier Films, Membranes and Flexible Substrates Poster Session
Spatial ALD, Fast ALD, and Large-Area ALD
Ternary and Quaternary Oxide Materials
364 Presentations
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