ALD 2015 Presentations
356 Presentations
0 Sections
Development of High Volume Manufacturing Methods for Molybdenum Disulfide Deposition
ALD Precursor Development for Cu and Other Metal Films
Nano-scale Coatings on Macro-scale Objects: Atomic Layer Deposition on a Volkswagen
Atmospheric Pressure Plasma Enhanced Spatial ALD
Overcome of Throughput Limitation Using Space Divided Plasma ALD Hybrid Reactor
Reaction-path Analysis of ALD Kinetics: Understanding the Algebraic and Geometrical Structure of Surface Reaction Models
ZnO ALD Coverage in the Pores of Anodic Aluminum Oxide Membranes Deposited Using Spatial ALD
ALD for High Volume Manufacturing: Latest Trends, Developments, and Market Applications
Spatial Atmospheric ALD of Zinc Oxysulfide Buffer Layers for CIGS Solar Cells
Multiply Confined Nano-catalysts based on Atomic Layer Deposition
Extremely Stable Platinum Electrocatalysts for Fuel Cells by Area-selective Atomic Layer Deposition and Atomic Scale Enhancement of Metal-support Interactions
Growth of Crystalline Al2O3 via Low Temperature Thermal ALD: Nanomaterial Substrate Phase Stabilization
Atomic Layer Deposition of Yttria-Stabilized Zirconia on Porous Silver Cathode for High-Performance Low-Temperature Solid Oxide Fuel Cells
Ultra-High Power Capabilities in Amorphous LiFePO4Thin Films
Stabilization Layer for High-κ Dielectrics Deposition Using Precursor Chemistry on III-V Semiconductors
Fabrication Technique for Atomic Growth of Thin SiO2 on Ni Films
Direct Comparison of the Properties of VO2 Films Prepared by PLD and ALD
Improved GaAs MOS Capacitor Performance by Sulfur Passivation
Regrown InN Ohmic Contacts by Atomic Layer Epitaxy
Atomic Layer Deposition of Amorphous In-Zn-O Films: A New Route to Ultra-Smooth and High Electron Mobility Transparent Conductors
Preparation of High Quality High-κ/GaSb Interfaces Using In-situ Spectroscopic Ellipsometry and Reflection High Energy Electron Diffraction
A Comparison of Tungsten Films Grown by CVD and Hot-wire Assisted ALD
Atomic Layer Deposition of 2 Dimensional Transition Metal Dichalcogenides (TMDCs) and Their Applications
