ALD 2015 Presentations
356 Presentations
0 Sections
An Algorithm for Finding Optimum Adsorption Geometries of Precursors for Surface Reaction
The Evolution of Atomic Layer Deposition: Authors, Topics and Communities
Considerations of Fluid Delivery Metrology Methods and Next Generation Standards for Advanced ALD and Pulsed-plasma Type Process Applications
Determination of Trace Metal Impurities in Tantalum Precursors by Inductively Coupled Plasma Mass Spectrometry
Plasma-initiated Property Modification of ALD Oxides
Selective Area Tungsten ALD on Patterned Gold/SiO2 Surfaces: Nucleation and Loading Effects
In-situ Real-time Spectroscopic Ellipsometry for the Monitoring and Control of Kinetic Processes in Oxide, Nitride, and Metal ALD
ALD Coated Borosilicate Glass MCPs With10 μm or 20 μm Pores
Sequential Infiltration of TMA/H2O in Polystyrene-Block-poly(Methylmethacrylate) Lamellae Studied Using In Situ Grazing Incidence Small Angle X-ray Scattering
High Aspect Ratio X-Ray Gratings Enabled by Pt ALD
The Effect of Surface Chemistry on Atomic Layer Platinum Deposition in High-Aspect-Ratio Nano-Structures
Resistive Switching in AlN and AlXGa1-xN Films Grown by Plasma Enhanced Atomic Layer Deposition
Influence of Reduced Al-doping Concentration with Modified Atomic Layer Deposition Recipes on Electrical Properties of TiO2 Films
Film Formation during the Low-temperature ALD of Copper: the Role of Island Coalescence
ALD of TiO2 Thin Layers at Low Temperatures for Processing of Memristive Devices
Abnormal Grain Growth of As-grown TiO2 Films by Inserting of Al2O3 Interlayer
Comparison Between ALD-deposited Al2O3 and PVD-deposited SiOx Films Deposited Onto Green-emitting OLED As Thin Film Barriers
Atomic-Layer Doping Induced Transparency Enhancement and Bandgap Widening beyond the Burstein-Moss Effect
Thermal Atomic Layer Deposition of AlN with TDMAA and NH3
Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
Polymer Crosslinking by Sequential Organometallic Vapor Infiltration: Trimethylaluminum Diffusion and Reaction in Polyvinyl Alcohol Nanofibers
Atomic Layer Deposition of Ge-doped ZrO2 Thin Film for Capacitor Application
Atomic Layer Deposition of Titanium Nitride Thin Film Using Unsymmetrical Dimethyl Hydrazine
