Precursor and Process Effects on Conformality for Atomic Layer Deposition of Silicon Nitride Using Nitrogen (N2) Plasma Presentation: S. Tang, 1 slide
Characterization of the Effect of PEALD Process Operating Environments on the Erosion of Perfluoroelastomer Chamber Seal Systems and Development Methodology for Materials to Meet Next Generation Demands Presentation: C. Liu, 1 slide
ALD TiO2 Coated on Silicone Surface: A Therapy against Microbial Infection Presentation: A.K. Bishal, 1 slide
Magneto Transport Measurements on ALD Grown Ternary GaXSb1-xTe3 Thin Films: Halosilylation Based Reactions for Compositional Control of the Transport Properties Presentation: C. Wiegand, 1 slide
Atomic Layer Deposition of Platinum on Nonwoven Nylon-6 Fiber Mats Using Trimethyl(Methylcyclopentadienyl) Platinum (IV) and Ozone Presentation: J.Z. Mundy, 1 slide
Extremely Organic-inorganic Hybrid Flexible Moisture-barrier Films for Flexible OLED by Atomic Layer Deposition Presentation: S-W. Seo, 1 slide
Optical and Structural Properties of Aluminum-Doped TiO2 Thin Films and Inverse Opals Presentation: R. Zierold, 1 slide
Enhancing of Catalytic Properties of Vanadia via Surface Doping with Phosphorus Presentation: V. Strempel, 1 slide
Atomic Layer Deposition of TiN Titanate Thin Films using TiN(II)acetylacetonate and Tetrakis(Diethylamino)titanium Presentation: S. Chang, 1 slide
Photocatalytic Antimicrobial Activity of Atomic-layer-deposited Zinc Oxides in Aqueous Environments Presentation: G.D. Han, 1 slide
Plasma-enhanced Atomic Layer Deposition of MO2N Thin Film as a Diffusion Barrier for Cu Metallization Presentation: Y. Jang, 1 slide
Structural and Electrical Characterization of Epitaxial Sr(Hf,Ti)O3 Grown on Ge (001) by Atomic Layer Deposition Presentation: S. Hu, 1 slide
Thin Film Transistors with Atomic Layer Deposited Gan and InGaN Channels for Low-temperature Compatible Electronic Applications Presentation: S. Bolat, 1 slide
Dipole Engineering for Controlling VTh on AlGaN/GaN Using ALD Metal Oxides Presentation: Y-C. Byun, 1 slide
Interfacial Layer Scavenging Induced by Metal Electrodes on Metal-Oxide-Ge Capacitors Presentation: Y.C. Jung, 1 slide
A Practical Approach for Fractional Fluorine Terminated Coatings on Nanoimprint Lithography Masks Presentation: T.E. Seidel, 1 slide
Design for Nanomanufacturability of Atomic Layer Deposition Process: Defect Distributions in ALD Films Presentation: A. Yersak , 1 slide
Room-temperature Atomic Layer Deposition of Al2O3 for Anticorrosion Coatings Using Trimethylaluminum and Remote-plasma Excited Water Vapor Presentation: K. Kanomata, 1 slide
New Gas Flow Controller with Fast Response and Highly Accurate Flows for ALD Processes Presentation: N. Kobayakawa, 18 slides
ALD Deposition of PbTeSe Quantum Dot Superlattice for High ZT Thermoelectric Materials Presentation: X. Chen , 1 slide