AVS Technical Library

Welcome to the AVS Technical Library providing convenient online access to AVS conference presentations as well as online educational training in fields related to materials, processing, and interfaces (Recommended Practices, books, monographs, videos, webinars, virtual programs, etc.).

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On Demand Events

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12th Vacuum Technique Conference

The 12th Vacuum Technique Conference articles published in the AVS Journal of Vacuum Science & Technology B.

ALD/ALE 2023 Presentations

The AVS 23rd International Conference on Atomic Layer Deposition (ALD 2023) featuring the 10th International Atomic Layer Etching Workshop (ALE 2023) will be a...

ALD/ALE 2022 Presentations

The AVS Atomic Layer Deposition Conference and the AVS Atomic Layer Etching Workshop (ALD/ALE 2022) was a three-day meeting (preceded by one day of tutorials),...

AVS Professional Development

Each year the Diversity and Inclusion and Professional Leadership Committees host several outreach events. Presentations from some of these events are available here.

Recommended Practices

These are downloadable PDFs.

AVS Videos, Webinars, & e-Talks

Each year AVS hosts educational Webinars and e-Talks. Presentations from some of these events are available here.