The 12th Vacuum Technique Conference articles published in the .TAVS Journal of Vacuum Science & Technology B. This is a collection of papers presented at the 12th Vacuum Technique Conference 2023, which was held April 19-21, 2023, in Ryn, Poland. The conference is organized by the Łukasiewicz Research Network — Tele and Radio Research Institute with the support of the Polish Vacuum Society. The mission of the conference is to provide a forum for presentation and exchange of research results and expertise in the field of vacuum science and techniques, vacuum technologies and their applications, and the characterization of surfaces and thin films. The goal of the conference is to continue to foster cooperation within the vacuum science community.