Fabrication of Hollow Structures Using Plasma Enhanced Atomic Layer Deposition Presentation: Masayuki Nakamura, Samco Inc., Japan, 1 slide
PALD of Germanium Antimony Tellurium Compounds Presentation: Mindaugas Silinskas, Otto von Guericke University, Germany, 1 slide
Flexible Alucone/Al2O3/Alucone Hybrid Dielectric Layers using in-situ ALD/MLD Techniques Presentation: Dong-Won Choi, Hanyang University, Korea, 1 slide
Characteristics of Low-k Film at Low Temperature Using SDP System Presentation: Minho Cheon, JUSUNG Engineering, Republic of Korea, 16 slides
Improved Corrosion Resistance and Mechanical Properties of CrN Hard Coatings with an Atomic Layer Deposited Al2O3 Interlayer Presentation: Zhixin Wan, Pusan National University, Republic of Korea, 1 slide
ALD Thin-Films for Micro-Channel Plate based Detectors Presentation: Nitin Deepak, University of Liverpool, UK, 1 slide
The Effect of SiOx/SiNx Multilayer Structure using Low Temperature Plasma Enhanced Atomic Layer Deposition for Gas Diffusion Barrier Presentation: Ju-Hwan Han, Hanyang University, Republic of Korea, 1 slide
Reduced Thermal Conductivity of ALD Synthesized PbTe/PbSe Nanolaminates Grown on Nanopatterned Substrates Presentation: Xin Chen, Old Dominion University, 1 slide
Atomic Layer Deposition of Transition Metal Dichalcogenide MoS2 Thin Films Presentation: Kai Zhang, Old Dominion University, 1 slide
The Impact on GaN MOS Capacitor Performance of in-situ Processing in a Clustered ALD/ICP/RIE Tool Presentation: Dilini Hemakumara, University of Glasgow, UK, 1 slide
Plasma-Enhanced ALD of Dielectrics on Aluminum and in-situ FUV Spectroscopy Presentation: Brianna Eller, Arizona State University, 1 slide
ALD on Textiles for Wearable Electronics Presentation: Wade Ingram, North Carolina State University, 1 slide
Enhancement of ZnO Nanorod Gas Sensors with AZO Nanolaminate Coating by Atomic Layer Deposition Presentation: Pengtao Lin, Old Dominion University, 1 slide
A Comparison Study of Atomic Layer Deposition (ALD) of Ceria (CeO2) Films using Ce(iPrCp)2 (iPr-amd) and Ce(iPrCp)3 Precursors Presentation: Maryam Golalikhani, Sonata LLC, 1 slide
Theoretical Study of Si-N Film Atomic Layer Deposition Mechanism with Hydrazine and Diclorosilane Precursors and their Derivatives Presentation: Alexander Goldberg, Schrodinger, Inc., 1 slide
Nucleation and Growth Characterization of Metallic Ruthenium Films Grown by PEALD on Surface Treated Si (100) at Low Substrate Temperatures Presentation: Nicholas Strnad, University of Maryland, 1 slide
Electrical, Optical and Mechanical Properties of ALD-Ti doped ZnO Thin Films prepared on Corning® Willow® Glass for the Application of Flexible Transparent Oxide Substrate Presentation: Woo-Jae Lee, Pusan National University, Republic of Korea, 1 slide
Atomic Layer Deposition of Doped Zinc Oxide as an Alternative to Fluorine Doped Tin Oxide for Transparent Contacts in Perovskite Solar Cells Presentation: Louise Ryan, Tyndall National Institute, Ireland, 1 slide
Oxides Nanomembranes Deposited by Atomic Layer Deposition for Lithium Ion Batteries Presentation: Gaoshan Huang, Fudan University, China, Nothing uploaded yet
Enhanced Photoelectrochemical Efficiency of Self-Organized TiO Nanotubes Films due to Secondary Materials Presentation: Jan Macák, University of Pardubice, Czech Republic, 1 slide
Atomic Layer Deposition of Ru and RuO2 on Powder Presentation: Jaehong Yoon, Yonsei University, Korea, 1 slide
Plasma-free Atomic Layer Deposition of Nickel and Nickel-based Alloy Thin Films for Nickel Silicide Presentation: Shunichi Nabeya, Yeungnam University, Republic of Korea, 1 slide
Room Temperature Atomic Layer Depostion of AlxSi1-xO and its Application for Dye Sensitized Solar Cells Presentation: Fumihiko Hirose, Yamagata University, Japan, 1 slide
Tungsten Thin Films Nucleation, Adhesion and Conductivity Improvement using Nanocomposite Barrier Layer Grown by Atomic Layer Deposition Presentation: Anil Mane, Argonne National Laboratory, 1 slide
Textile-based Heater Fabricated by Atomic Layer Deposition for Artificial Muscles Presentation: Jong Seo Park, Yonsei University, Republic of Korea, 1 slide