ALD/ALE 2021 Virtual Meeting
222 Presentations
0 Sections
About the Importance of Purge Time in EM1: Molecular Layer Deposition On Demand of Alucone Films
Effect of Vapor-Phase Metal Infiltration on Lithography of PMMA Resist for EUV Applications
Mechanics of Flexible ε-Fe2O3/Organic Superlattice Thin-Film Magnets
Mechanics of Flexible ε-Fe2O3/Organic Superlattice Thin-Film Magnets
Properties of Atomic Layer Deposited ZrO2 or Fe2O3 Based Multilayers
Evaluation of the Near-Zero Temperature Coefficient of Resistivity (Nz-TCR) of ALD TiSiXN Films
Atomic Layer Deposition of CuSnXSY from Low-Cost Precursors and Its Optical and Electrical Characteristics
Substitutional W Doping of MoS2 for Threshold Voltage Control of Field Effect Transistor
Atomic Layer Deposition for Modification of Various 1D Nanomaterials
Wafer-Scale Synthesis of Transition Metal Dichalcogenide Thin Films by ALD-Based Technique Towards Nanoelectronics and Optoelectronics Applications
Atomic Layer Deposition of Ultrathin Tungsten Oxide Films for 2D WS2 Synthesis
2D Molybdenum Dichalcogenides Family by Atomic Layer Deposition
2D Core-Shell Quantum Dots Grown by ALD
Recovery Enhancement of Al2O3 Functionalized MoS2 Gas sensor by Atomic Layer Deposition
Understanding and Controlling Polymer-Organometallic Precursor Interactions in Sequential Infiltration Synthesis
ALD of In2O3 in PMMA: Resolving the Atomic Structure of Sequential Infiltration Synthesized Clusters
Atomic Layer Deposition of Al2O3 and TiO2 on Polydimethylsiloxane
Modified 3D Printed Architectures: Effects of Coating and Infiltration by Alumina on ABS
Synthesis of Silicon Carbide Thin Films by Post-Processing of EM1: Molecular Layer Deposition On Demand (Mld) Polyamide Films on Silicon
Fabrication of Free-standing Three-dimensional Structures by Spatial Atomic Layer Printing
