ALD/ALE 2021 Virtual Meeting
222 Presentations
0 Sections
Ultrathin Amorphous Titanium Oxide Field-Effect Transistors with Large Gate-Induced Electron Mobility Modulation
Optical Quantizing Structures in Al2O3/TiO2 Heterostructures by Plasma Enhanced Atomic Layer Deposition
Excellent Surface Passivation of Germanium by ALD Al2O3 with a-Si:H Interlayers
Tunable and Scalable Fabrication of Plasmonic Dimer Arrays With Sub-10 nm Nanogaps by Area Selective ALD
Lithium Aluminum Fluoride as an Ultraviolet Coating Material
Stress Compensated HfO2/SiO2 High-reflective Coatings at 355 nm and 532 nm by Plasma Enhanced Atomic Layer Deposition using Substrate Biasing
Atomic Layer Deposition of Nanocomposite Antimicrobial and Antiviral Coatings
Capacitance Modulation by Light and Mechanical Stimuli in ALD-deposited ZnO Thin Films Integrated in Piezotronic MEMS Strain Microsensors
Applications of Atomic-Scale Processing for the Next Decade of MEMS Technology
Texture Control of Piezoelectric Aluminum Nitride Grown by Atomic Layer Deposition for 3D Microelectromechanical Systems
Aqueous Degradation and Nanoscale Coatings of Al2O3 via Atomic Layer Deposition (ALD) of BaAl2O4: Eu2+, Dy3+ Long Afterglow Phosphors
COO Reduction for Semiconductor Parts via ALD Coatings and Recycling of Parts
Characterization of Al Doped SnO2 Thin Films With Various Doping Positions Using Atomic Layer Deposition
Bias-Enhanced Atomic Layer Annealing for the Deposition of High-Quality Aluminum Nitride Films on Silicon
Developing a Model for Describing the Effect of Dispersion of P-Type Co-Catalyst on Photocatalytic Activity Using ALD Prepared CuOX/TiO2 Photocatalyst
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Indium Oxide
Zero Temperature Coefficient of Resistance in Back-End-of-the-Line - Compatible Titanium-Aluminum Nitride EM8: Nanolaminates On Demand Grown by Plasma Enhanced Atomic Layer Deposition
Effect of NH3 Flow on Electrical and Mechanical Properties of ALD TiN Thin Films
Atomic Layer Deposition of Nio for the Modification of Electro-Catalysts for Alkaline Water Splitting
Gas-Sensing Properties of Hierarchical Core-Shell Nanofibers: Radial Modulation of Hole-Accumulation Layer
Plasma-Resistant Mixed Metal Oxide Films
High-Reliable Atomic Layer Deposited N-doped GeSe and Its Leaky-Integrate-and-Fire Neuron Application
Influence of H2S Dosage on Surface Roughness of Zn(O,S) Films by Atomic Layer Deposition (ALD)
