ALD/ALE 2021 Virtual Meeting
222 Presentations
0 Sections
Monday Plenary & Awards Live Session
Tuesday Precursors (AF): ALD Processes Live Session
Tuesday ALD Applications (AA) Live Session
Tuesday Atomic Layer Etching Live Session I
Wednesday Selective Deposition (AS) Live Session
Wednesday AM/AF (in-situ metro) Live Session
Wednesday Atomic Layer Etching Live Session II
Understanding Metal-Support Interactions in Model Pd/ALD-Al2O3/SiO2 Catalysts
Atomic Layer Deposition for Improved Biomass Conversion Catalysts
Size Control of Gold Nanoparticles Using Sequential Atomic Layer Deposition of Gold and Titanium Dioxide
Atomic Layer Deposition of Pt@Pd Core-Shell Structure Electrocatalyst for Carbon Dioxide Reduction
Electrochemical Activation of Atomic Layer Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
High-crystalline RuO2based on Atomic Layer Deposition for Oxygen Evolution Catalyst
Li Compound-Based Two-Terminal Artificial Synaptic Devices via Atomic Layer Deposition
Li-Nb-O Family Deposited by Atomic Layer Deposition (ALD) for Artificial Neuron and Synapse
Fabrication of Vertical-Type Phase-Change Memory Leveraging Atomic Layer Deposition
Metal-insulator Transition in ALD VO2 using VCl4 and H2O as Precursors
Atomic Layer Deposition of Antiferroelectric La-Doped Hf0.5Zr0.5O2 Thin Film and Its Electrical Behaviors
Study of the Impact of Annealing and Doping Element on the Crystallinity of Hafnium Oxide: Application for FeFET Memories
Effect of Ti Scavenging Layer on Ferroelectricity of HfxZr1−xO2 Thin Films Fabricated by Atomic Layer Deposition using Hf/Zr Cocktail Precursor
Structural Modulation of ALD IGZO TFT for Controlling the Hydrogen Concentration
The Impact of PEALD InGaO TFT Performances on Paring In/Ga Precursor Structures
Two-dimensional electron gas at atomic-layer-deposited ZnS/ZnO Heterostructure