Metal-doped HfO2 for Ferroelectric Tunneling Junction Applications using Atomic Layer Deposition Presentation: Chi Thang Nguyen, Incheon National University, Korea, 1 slide
Atomic Layer Deposition of Al- and Ga-doped HfOx Films for Resistive Switching Layer Presentation: Sungyeon Ryu, Seoul National University of Science and Technology, Republic of Korea, 1 slide
Synthesis of Well-Defined POx/V2O5 Powder Catalysts via Atomic Layer Deposition Presentation: Kristian Knemeyer, Technische Universität Berlin, Germany, 1 slide
Use of New Cyclopentadienyl Tris(dimethylamino) Based Zirconium Precursors for the Leakage Current Reduction of Atomic Layer Deposited ZrO2 Thin Films Presentation: Baek Su Kim, Seoul National University, Republic of Korea, 1 slide
Control of Refractive Index by Atomic Layer Deposition on Various Textile Surfaces Presentation: Woo Hyeok Kwon, Incheon National University, Republic of Korea, 1 slide
Zinc Tin Oxide Thin Films Grown by Atomic Layer Deposition for Charge-Trap Flash Memory Presentation: Jun Shik Kim, Seoul National University, Republic of Korea, 1 slide
Atomic Layer Deposition of Si-doped HfO2 Thin Film by using HfCl4, SiCl4 and H2O for FeRAM Device Application Presentation: Se-Won Lee, Versum Materials Korea, Republic of Korea, 1 slide
Atomic Layer Deposition of Ru Metal Thin Film with Substrate-Dependent Growth Behavior on Ta2O5 Substrate Presentation: Cheol Hyun An, Seoul National University, Republic of Korea, 1 slide
Forming of Conformal Multilayer on Periodic Microstructures for Solar Selective Absorption Presentation: Makoto Shimizu, Tohoku University, Japan, Makoto Shimizu, Tohoku University, Japan, 1 slide
Ti-doped ZnO Films Grown by Atomic Layer Deposition for Solar Cell Applications Presentation: Ji Hye Kim, ISAC Research Inc., Republic of Korea, 1 slide
Crystal Structure and Electrical Properties Modulation of Al-doped HfZrO2 Thin Films by ALD Presentation: Seung-Won Lee, Korea Maritime and Ocean University, Republic of Korea, 1 slide
PE-ALD for Deposition of TiN as a Refractory Plasmonic Material Presentation: Kahraman Keskinbora, Max Planck Institute for Intelligent Systems, Germany, 1 slide
Physical Characaterization of Transition Metal Dichalcogenide MoS2 Thin Films Synthesized by Atomic Layer Deposition Presentation: Hongguo Zhang, Old Dominion University, 1 slide
Synthesis of ALD Iridium Thin Films on 3-D Fabricated Monel K-500 Steel Samples Presentation: Helmut Baumgart, Old Dominion University, 1 slide
Accurate Modeling of the Gate Leakage Currents in Metal-Insulator-Semiconductor (MIS) Devices using Ultra-thin High-k Oxides Presentation: Hector Uribe-Vargas, National Institute of Astrophysics, Optics and Electronics, 1 slide
Optimization of Microwave Generated Surfatron for Wafer-scale Plasma Enhanced ALD System Presentation: Hyung Sang Park, ISAC Research Inc., Republic of Korea, 1 slide
Grow of GaN Thin Films over a Si/Al2O3 Stack by Thermal and Plasma Enhanced Atomic Layer Deposition as MOS Structure Presentation: Joaquin Alvarado, University of Puebla, Mexico, 1 slide
Reduction of Hysteresis in p-Type Atomic Layer Deposited SnO Thin Film Transistors by Adopting Interfacial Layers Presentation: Younjin Jang, Seoul National University, Republic of Korea, 1 slide
The Impact of ALD ZrO2 Gate Insulators on Indium Tin Zinc Oxide (ITZO) Thin Film Transistor Applications Presentation: Wan-Ho Choi, Hanyang University, Republic of Korea, 1 slide
Templated Carbon Nanotube Growth from Reduced NiO Atomic Layer Deposition Presentation: Erin Cleveland, U.S. Naval Research Laboratory, 1 slide
Atomic Layer Deposition of Titanium Oxide using Heteroleptic Titanium Precursors with a Linked Ligand Presentation: Seongyoon Kim, Sejong University, Republic of Korea, 1 slide
Ex-Situ Grown Low-Temperature SiNx on GaN with Crystalline Interfacial Layer using Hollow Cathode PEALD Presentation: Xin Meng, The University of Texas at Dallas, 1 slide
A Study on the Mechanical and Electrical Properties of Atomic and Molecular Layer Deposited ZnO – Zincone Alloy Thin Films with change of Molecular Backbone Structures. Presentation: Seung Hak Song, Korea University, Republic of Korea, 1 slide
ALD and Nanocellulose Based Sensors for Ultra-low Power, Room Temperature Ozone Gas Monitoring for Respiratory Ailments and Wellness Management Presentation: Bongmook Lee, North Carolina State University, 1 slide