ALD-ALE 2018 Presentations
365 Presentations
0 Sections
Atomic Layer Deposition of Al- and Ga-doped HfOx Films for Resistive Switching Layer
Synthesis of Well-Defined POx/V2O5 Powder Catalysts via Atomic Layer Deposition
Use of New Cyclopentadienyl Tris(dimethylamino) Based Zirconium Precursors for the Leakage Current Reduction of Atomic Layer Deposited ZrO2 Thin Films
Control of Refractive Index by Atomic Layer Deposition on Various Textile Surfaces
Zinc Tin Oxide Thin Films Grown by Atomic Layer Deposition for Charge-Trap Flash Memory
Atomic Layer Deposition of Si-doped HfO2 Thin Film by using HfCl4, SiCl4 and H2O for FeRAM Device Application
Atomic Layer Deposition of Ru Metal Thin Film with Substrate-Dependent Growth Behavior on Ta2O5 Substrate
Forming of Conformal Multilayer on Periodic Microstructures for Solar Selective Absorption
Ti-doped ZnO Films Grown by Atomic Layer Deposition for Solar Cell Applications
Crystal Structure and Electrical Properties Modulation of Al-doped HfZrO2 Thin Films by ALD
PE-ALD for Deposition of TiN as a Refractory Plasmonic Material
Physical Characaterization of Transition Metal Dichalcogenide MoS2 Thin Films Synthesized by Atomic Layer Deposition
Synthesis of ALD Iridium Thin Films on 3-D Fabricated Monel K-500 Steel Samples
Precursor Dependent Optical Properties of ALD TiO2
Accurate Modeling of the Gate Leakage Currents in Metal-Insulator-Semiconductor (MIS) Devices using Ultra-thin High-k Oxides
Optimization of Microwave Generated Surfatron for Wafer-scale Plasma Enhanced ALD System
Grow of GaN Thin Films over a Si/Al2O3 Stack by Thermal and Plasma Enhanced Atomic Layer Deposition as MOS Structure
Reduction of Hysteresis in p-Type Atomic Layer Deposited SnO Thin Film Transistors by Adopting Interfacial Layers
The Impact of ALD ZrO2 Gate Insulators on Indium Tin Zinc Oxide (ITZO) Thin Film Transistor Applications
Templated Carbon Nanotube Growth from Reduced NiO Atomic Layer Deposition
Atomic Layer Deposition of Titanium Oxide using Heteroleptic Titanium Precursors with a Linked Ligand
Ex-Situ Grown Low-Temperature SiNx on GaN with Crystalline Interfacial Layer using Hollow Cathode PEALD
A Study on the Mechanical and Electrical Properties of Atomic and Molecular Layer Deposited ZnO – Zincone Alloy Thin Films with change of Molecular Backbone Structures.
