ALD/ALE 2020 Virtual Meeting
243 Presentations
0 Sections
Live Technical Sessions - Tuesday
Live Technical Sessions - Wednesday
Live Tutorial Session - Tuesday
Live Tutorial Session - Wednesday
Aspect-Ratio Dependence of Isotropic Thermal ALE and Mitigation Thereof
Mechanistic Insights into Thermal Dry Atomic Layer Etching of Metals and Alloys
A Novel Approach to Evaluate LEIS Data of 2D SnS2 to Quantify the First and Second Atomic Layer Coverage
Exploring ALD 2D Chalcogenides Beyond MoS2
Highly Stable and Active Catalyst for Dry Reforming of Methane via Molecular Layer Deposition Approach
Top and Bottom Ta2O5 Topographical Selective Deposition on 3D structures by Plasma Enhanced Atomic Layer Deposition
Cryo-ALE of SiO2 with C4F8 Physisorption: Process Understanding and Enhancement
On the Fundamentals of ALD: The Importance of Getting the Picture Right
ABC-Type Pulsing for Improved ALD of Group 13 Nitrides using Trialkyl Metal Precursors
Mechanism of the HF Pulse in the Thermal Atomic Layer Etch of HfO2 and ZrO2: A First Principles Study
β-Silyl-Diamides and β-Silyl-Amidoamines Lead to Unusual Co(II & IV) Precursors
Vapor Phase Infiltration for Transforming Polymers into Hybrid Materials: Mechanisms of Inorganic Entrapment and Structure-Property Implications
When ALD Outperforms MOCVD: Direct Comparison of Epitaxial InN Films
Ultrathin TiN by Thermal ALD as Electrically Conducting Li-ion Diffusion Barrier for Integrated 3D Thin-Film Batteries
Design of Advanced Photocatalytic Materials by Atomic Layer Deposition (ALD)
As Deposited Epitaxial Functional Complex Oxides - Enabling Novel Technology
Plasma Enhanced Spatial Atomic Layer Deposition of Silicon Nitride Using Di(isopropylamino)silane and N2 Plasma
Surface Functionalization and Atomic Layer Deposition of Metal Oxides on MoS2 Surfaces
Gas Sensing Characteristics of MoxW1-xS2 Synthesized by Atomic Layer Deposition
