ALD/ALE 2020 Virtual Meeting
243 Presentations
0 Sections
Biocompatibility of ALD Coatings on Nano- and Microstructures: Cell Viability Studies of Murine and Human Induced Stem Cell-Derived Neurons
Growth for Solution ALD for PV Application
A Combinatorial Approach to the Ferroelectric Properties in HfxZr1-xO2 Deposited by Atomic Layer Deposition
The Role of Steric Hindrance During Plasma Enhanced ALD of SiO2
Plasma Enhanced Atomic Layer Deposition of Carbon Incorporated Silicon Oxynitride (SiON) Thin Films Using Novel Organochlorodisiloxane Precursors
Area Selective Atomic Layer Deposition of Molybdenum Films on Nanoscale Metal and Metal Nitride Patterns
ALD-Grown Gallium Oxide Thin Films with Properties Close to Bulk Wafers
Understanding the Influence of In-situ Ar-Plasma Annealing Processes on the Film Properties of ALD-Grown AlN Layers
Efficient and Flexible Dielectrics at Elevated Temperatures from Polymers Sandwiched with Wide Bandgap Inorganic Films Grown via Atomic Layer Deposition
Thin-Film Deposition from Mo(CO)6: The Effect of Co-Reactants and Temperature on Film Purity
Feasibility of Boron Nitride Film Growth at Lower-than 250°C Substrate Temperature via Hollow-Cathode Plasma-ALD: In-situ Monitoring of Plasma Composition Effect
Structure, Morphology and Mechanical Behavior of ALD TiSiN films
On the Atomic Layer Deposition of Catalysts for Dehydrogenation of Propane with CO2: The Study of Reaction Performance and Coke Formation
Ti-Doped ZnO Thin Films by Atomic Layer Deposition: Growth Mechanism Study and Influence of Process Parameters on Material Properties
Indium Aluminum Nitride Growth Kinetics and Crystallinity Studied Using In Situ and Ex Situ Synchrotron X-ray Scattering
Potential of Guanidinate and Amidinate Gallium Complexes as Precursors for Atomic Layer Deposition
