ALD/ALE 2020 Virtual Meeting
243 Presentations
0 Sections
Novel Chemistries for Layer-by-Layer Etching of 2D Semiconductor Coatings and Organic-Inorganic Hybrid Materials
Atomic Layer Deposited Al-doped TiOx as Passivating Contacts on Silicon Solar Cells
The Evolution of Temperature Monitoring in ALD
Thermally Assisted Area Selective Atomic Layer Deposition
Low Temperature Thermal a-SiC Deposition Using Pulse CVD and ALD
Infrared Spectroscopy of SiNx Grown by Atomic Layer Deposition on Structured Substrates
The Structure and Properties of Titanium Nitride Layers Grown by Plasma Enhanced Atomic Layer Deposition on Different Substrates
Novel selenium ALD precursors
Enabling Strong Magnetoelectric 2-2 Composites Made of AlN Films Grown by Plasma-Enhanced ALD on Magnetostrictive Foils for Energy Harvesting Applications
Novel Approach for Conformal Chemical Vapor Phase Deposition of Ultra-Thin Conductive Silver Films
Advanced 3D Particle Functionalization using Self-Limiting Reactions in Fluidized Bed Reactor Technology
Solution-Based ALD Routes Towards Thin Films of Organic-Inorganic Hybrid Perovskites
The Influence of ALD-ZnSnO Buffer Layer Process Conditions on the Characteristics of Tin Sulfide Thin Film Solar Cells
A Novel Cobalt Precursor for Area-Selective Deposition
Comparison of Growth Characteristics and Nanoparticle Formation by O2 or H2 Reactant Gas in Pt ALD
In-situ Real-Time and Ex-situ Spectroscopic Analysis of Al2O3 Films Prepared by PEALD
Stabilizing Red Fluoride LED Phosphors using Atomic Layer Deposition
Modulated VO2 Phase Change Properties by Ge Doping
Topographic Area Selective Deposition: A Comparison Between PEALD/ALE and PEALD/Sputtering Approaches
Conformality of TMA/H2O and TMA/O3 Processes Evaluated using Lateral High-Aspect-Ratio Structures
Atomic Layer-Deposited Superconducting Niobium Nitride for Quantum Device Applications
Gold-Coated Optical Fibers are Sensors for ALD Deposition and Can be Exploited for Biosensing
Carbenes Can Make a CVD Process into an ALD Process by Surface Passivation
