ALD-ALE 2017 Presentations
363 Presentations
0 Sections
Sub-10 nm Scalable Hybrid Dielectric Engineering on MoS2 for 2D Materials Based Devices
Digital Doping of ALD VO2 for Thermochromic Applications
Characterization and Comparison of ALD Laminate Structures with HfO2 + SiO2 as MIM Capacitor Dielectric for GaAs HBT Device
Atomic Layer Deposited Single Crystal High-k Y-doped Cubic HfO2 on GaAs(001) Utilizing HfO2/Y2O3 Super-cycles
Controlled and Selective Etches for Gate All-Around Device Fabrication
Towards Producing Bulk Monolithic Core/Shell Nanocomposites
Nanolaminate Copper Barriers of Ru/TaNx Thin Films by Inductively Coupled Plasma Enhanced Atomic Layer Deposition
On the Possibility of the Development of Vicinal Superlattices in Quantum Wires on Semiconductor Low - Index Surfaces
Fully CMOS-Compatible Synthesis and Photodetector-Integration of Ultrathin, Parallel-Aligned ZnO Nanowire Arrays by Infiltration Synthesis
Monodispersed, Highly Interactive Facet Oriented Pd Nanograins Grown by ALD onto Electrospun Polymeric Nanofibers
Structural and Electronic Properties of MoS2 Grown using a 300mm Commercial Atomic Layer Deposition (ALD) Reactor
