ALD-ALE 2017 Presentations
363 Presentations
0 Sections
PALD of Germanium Antimony Tellurium Compounds
Flexible Alucone/Al2O3/Alucone Hybrid Dielectric Layers using in-situ ALD/MLD Techniques
Characteristics of Low-k Film at Low Temperature Using SDP System
Improved Corrosion Resistance and Mechanical Properties of CrN Hard Coatings with an Atomic Layer Deposited Al2O3 Interlayer
ALD Thin-Films for Micro-Channel Plate based Detectors
The Effect of SiOx/SiNx Multilayer Structure using Low Temperature Plasma Enhanced Atomic Layer Deposition for Gas Diffusion Barrier
Reduced Thermal Conductivity of ALD Synthesized PbTe/PbSe Nanolaminates Grown on Nanopatterned Substrates
Atomic Layer Deposition of Transition Metal Dichalcogenide MoS2 Thin Films
The Impact on GaN MOS Capacitor Performance of in-situ Processing in a Clustered ALD/ICP/RIE Tool
Plasma-Enhanced ALD of Dielectrics on Aluminum and in-situ FUV Spectroscopy
ALD on Textiles for Wearable Electronics
Enhancement of ZnO Nanorod Gas Sensors with AZO Nanolaminate Coating by Atomic Layer Deposition
A Comparison Study of Atomic Layer Deposition (ALD) of Ceria (CeO2) Films using Ce(iPrCp)2 (iPr-amd) and Ce(iPrCp)3 Precursors
Theoretical Study of Si-N Film Atomic Layer Deposition Mechanism with Hydrazine and Diclorosilane Precursors and their Derivatives
Nucleation and Growth Characterization of Metallic Ruthenium Films Grown by PEALD on Surface Treated Si (100) at Low Substrate Temperatures
Electrical, Optical and Mechanical Properties of ALD-Ti doped ZnO Thin Films prepared on Corning® Willow® Glass for the Application of Flexible Transparent Oxide Substrate
Atomic Layer Deposition of Doped Zinc Oxide as an Alternative to Fluorine Doped Tin Oxide for Transparent Contacts in Perovskite Solar Cells
Oxides Nanomembranes Deposited by Atomic Layer Deposition for Lithium Ion Batteries
Enhanced Photoelectrochemical Efficiency of Self-Organized TiO Nanotubes Films due to Secondary Materials
Atomic Layer Deposition of Ru and RuO2 on Powder
Plasma-free Atomic Layer Deposition of Nickel and Nickel-based Alloy Thin Films for Nickel Silicide
Room Temperature Atomic Layer Depostion of AlxSi1-xO and its Application for Dye Sensitized Solar Cells
Tungsten Thin Films Nucleation, Adhesion and Conductivity Improvement using Nanocomposite Barrier Layer Grown by Atomic Layer Deposition
